美國BIRD功率計鳥牌4421 射頻功率計參數
美國BIRD功率計鳥牌4421 射頻功率計參數
適用于半導體的生產和科研領域，讀 數誤差+/-3%
● 采用液晶背光顯示，可對正反向功率 及駐波比等進行三位半數字顯示
● 功率測試范圍可人工或自動設置，并有 GPIB和RS-232接口供選擇
功率范圍: 100mW-10kW
頻率范圍: 100kHz-2.5GHz
駐波比范圍: 1.0-199.9
讀數誤差: ±3%
功能: 測量正反向功率，通過W和dBm顯示:測量駐波比及回波損耗，通過dB顯示; 以及測量最大最小值 顯示: 三位半液晶背光顯示
工作電源: AC和電池兩種，115/230AC，50/60Hz或8節1.2V鎳鎘電池
尺寸: 312X309X108mm
接口選項: IEEE-488接口或RS-232接口
BIRD(鳥牌)4421功率計
Precision Power Meter for Semiconductor Processing Applications
• ±1% uracy - plished through the use of sensors with an
automatic frequency compensation scheme, where the error contributions
due to directional coupler frequency response characteristics are
eliminated.
• Wide Dynamic Range - The instrument will meet the full uracy
specification over a 35 dB dynamic range.
• Excellent Measurement Repeatability - Typically <0.1%
• Digital Display - Along with automatic VSWR calculation
• Computer Interface - RS-232 and IEEE-488 standard
The Bird® Model 4421 is a precision RF power meter that, while
originally intended for general purpose laboratory applications where
high uracy is required, has found wide eptance in semiconductor
processing applications. The product is configured as a system,
consisting of the Model 4421 digital display and a precision power
sensor selected for the application based upon maximum power
and operating frequency.
MODEL 4421 MULTIFUNCTION POWER METER
Power Range: 100 mW to 25 kW FS
Frequency Range : 100 kHz - 1 GHz
VSWR Range: 1.0 - 199.9
Functions : Forward and reflected power in W or dBm, VSWR,
return loss in dB and min./max. values
Overrange : Audible warning when RF power input exceeds
120% of sensor's maximum power range
Indication Display: 3 1/2 digit-liquid crystal display with indicator
for mode, measurement units, battery condition,
programming status, and trend arrows.
Switchable backlight.
美國BIRD功率計鳥牌4421 射頻功率計參數
Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride
1.2 V cells (NEDA type 10014)
Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H
(312 mm x 309 mm x 108 mm)
with handle extended 15 7/16" L (392 mm)
Weight : 11 lbs. (5 kg.)
Interconnects: 1 meter latch-n-lock coiled cable
Interfaces: IEEE-488 and RS-232 standard
Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)
Required Product: RF Power Sensor
essories: Case 4300A215 (page 43)
19" Panel Mount Kit 4421-250
Latch & Lock Case 4421-038
功率傳感器
4020系列功率傳感器
Model(型號)
Frequency Range(頻率范圍)
Power Input(功率范圍)
4021
1.8-32 MHz
300 mW to 1 kW (1.2 kW max.)
4022
25-1000 MHz
300 mW to 1 kW (1.2 kW max.)
4024
1.5-32 MHz
3 W to 10 kW (12 kW max.)
4025
100-2500 kHz
3 W to 10 kW (12 kW max.)
4027A系列功率傳感器
Model(型號)
Frequency Range(頻率范圍)
Power Input(功率范圍)
4027A250K
250-400 kHz
3 W to 10 kW
4027A400K
400-550 kHz
3 W to 10 kW
4027A800K
800-950 kHz
3 W to 10 kW
4027A2M
1.5-2.5 MHz
3 W to 10 kW
4027A4M
3-5 MHz
3 W to 10 kW
4027A10M
10-15 MHz
3 W to 10 kW
4027A12M
10-15 MHz
300 mW to 1kW
4027A25M
25-30 MHz
3 W to 9 kW
4027A35M
35-45 MHz
3 W to 7.5 kW
4027A60M
45-65 MHz
3 W to 6 kW
4027A100M
95-105 MHz
3 W to 4 kW
4027A150M
150-170 MHz
3.75 W to 3.75 kW
4027F系列過濾型傳感器
Model(型號)
Frequency Range(頻率范圍)
Power Input(功率范圍)
4027F2M
1.8-2.2 MHz
100 W to 10 kW
